Patent Assignment
Reel/Frame 059454/0697
Assignment of Assignor's Interest
Recorded: 2022-03-21
Pages: 3
Assignors
KIM, KYONG NAM
Executed: 2022-03-17
PARK, JUN YOUNG
Executed: 2022-03-17
KIM, SEOK JUN
Executed: 2022-03-17
Assignee
DAEJEON UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION
(YONGUNDONG, DAEJEON UNIVERSITY) 62, DAEHAK-RO DONG-GU, DAEJEON, 34520, KOREA, REPUBLIC OF
Covered Property
(1)
Method and System for Removing L-Fc in Plasma Etching Process