Patent Assignment
Reel/Frame 059458/0359
Assignment of Assignor's Interest
Recorded: 2022-03-31
Pages: 6
Assignors
GOTO, DAISUKE
Executed: 2022-03-29
MORIKAWA, KATSUHIRO
Executed: 2022-03-28
KOGA, TAKAHIRO
Executed: 2022-03-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Liquid Nozzle and Cleaning Apparatus