Patent Assignment
Reel/Frame 059475/0738
Assignment of Assignor's Interest
Recorded: 2022-04-01
Pages: 3
Assignors
LAI, PEI YING
Executed: 2022-03-29
HSU, CHIA-WEI
Executed: 2022-03-29
LIN, TSUNG-DA
Executed: 2022-03-28
CHUI, CHI ON
Executed: 2022-03-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method for Forming Semiconductor Structure Using Fluorine to Treat Gate Stack