Patent Assignment
Reel/Frame 059492/0655
Assignment of Assignor's Interest
Recorded: 2022-04-04
Pages: 7
Assignors
ZACH, FRANZ
Executed: 2022-02-27
SMITH, MARK D.
Executed: 2022-03-28
GRONHEID, ROEL
Executed: 2022-03-01
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Mitigating Overlay Distortion Patterns Caused by a Wafer Bonding Tool