Patent Assignment
Reel/Frame 059511/0587
Assignment of Assignor's Interest
Recorded: 2022-03-25
Pages: 15
Assignors
TAKEYAMA, TAMAKI
Executed: 2022-02-28
CHIHAYA, HIROAKI
Executed: 2022-02-28
YAMAGATA, MOTOI
Executed: 2022-03-08
NAKAGAWASAI, MANABU
Executed: 2022-03-13
ORIMOTO, SHINJI
Executed: 2022-02-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Device for Substrate Processing