Patent Assignment
Reel/Frame 059518/0392
Assignment of Assignor's Interest
Recorded: 2022-04-06
Pages: 4
Assignee
NISSIN ION EQUIPMENT CO., LTD.
29 HINOKIGAOKA MINAKUCHI-CHO, KOKA-CITY, SHIGA, 528-0068, JAPAN
Covered Property
(1)
Vaporizer, Ion Source and Method for Generating Aluminum-Containing Vapor