Patent Assignment
Reel/Frame 059520/0524
Assignment of Assignor's Interest
Recorded: 2022-04-06
Pages: 6
Assignors
GARDNER, MARK I.
Executed: 2022-04-04
FULFORD, H. JIM
Executed: 2022-04-06
MUKHOPADHYAY, PARTHA
Executed: 2022-04-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
3D High Density Self-Aligned Nanosheet Device Formation with Efficient Layout and Design