Patent Assignment
Reel/Frame 059529/0361
Assignment of Assignor's Interest
Recorded: 2022-04-07
Pages: 8
Assignors
KIM, YUNHWAN
Executed: 2022-03-15
SUNG, DOUGYONG
Executed: 2022-03-15
KIM, BYEONGSANG
Executed: 2022-03-30
NOH, YOUNGJIN
Executed: 2022-03-15
KIM, NAMKYUN
Executed: 2022-03-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus Including Plurality of Electrodes
Application:
17/713,433 →
Publication:
US 2023/0100582