Patent Assignment
Reel/Frame 059533/0627
Assignment of Assignor's Interest
Recorded: 2022-04-07
Pages: 5
Assignors
GU, SHICHEN
Executed: 2021-09-28
REN, WEIMING
Executed: 2021-09-30
XI, QINGPO
Executed: 2021-09-28
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Multiple Charged-Particle Beam Apparatus with Low Crosstalk