Patent Assignment
Reel/Frame 059550/0404
Assignment of Assignor's Interest
Recorded: 2022-04-08
Pages: 3
Assignors
BAMESBERGER, SETH J
Executed: 2021-02-11
IM, SE-HYUK
Executed: 2021-02-10
CHOI, BYUNG-JIN
Executed: 2021-02-05
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Chuck Assembly, Planarization Process, Apparatus and Method of Manufacturing an Article