Patent Assignment
Reel/Frame 059562/0504
Assignment of Assignor's Interest
Recorded: 2022-04-11
Pages: 3
Assignors
HUANG, I-HSIUNG
Executed: 2022-02-22
CHEN, YUNG-CHENG
Executed: 2022-02-23
WU, TUNG-LI
Executed: 2022-04-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Euv Lithography Apparatus and Operating Method for Mitigating Contamination