Patent Assignment
Reel/Frame 059591/0361
Assignment of Assignor's Interest
Recorded: 2022-04-13
Pages: 6
Assignors
NAM, WON SIK
Executed: 2022-04-12
YEON, KANG HEUM
Executed: 2022-04-12
SONG, DAE SEOK
Executed: 2022-04-12
Assignee
NPS CORPORATION
98-23, DONGTANSANDAN 7-GIL, DONGTAN-MYEON, HWASEONG-SI, GYEONGGI-DO, 18487, KOREA, REPUBLIC OF
Covered Property
(1)
Heat Source Device, Substrate Support Device and Substrate Processing Facility