Patent Assignment
Reel/Frame 059609/0290
Assignment of Assignor's Interest
Recorded: 2022-04-15
Pages: 8
Assignors
HAN, YUN
Executed: 2022-03-10
LIU, ERIC CHIH-FANG
Executed: 2022-03-10
YU, KAI-HUNG
Executed: 2022-03-10
CHANG, SHIHSHENG
Executed: 2022-03-10
RANJAN, ALOK
Executed: 2022-03-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Sacrificial Gate Capping Layer for Gate Protection During Source/Drain Contact Opening