Patent Assignment
Reel/Frame 059624/0366
Assignment of Assignor's Interest
Recorded: 2022-04-18
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(2)
Control of Processing Parameters During Substrate Polishing Using Cost Function
Control of Processing Parameters During Substrate Polishing Using Cost Function or Expected Future Parameter Changes
PCT:
PCT/US2022/018161 ↗