Patent Assignment
Reel/Frame 059696/0246
Assignment of Assignor's Interest
Recorded: 2022-03-02
Pages: 2
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Lower Electrode Assembly and Plasma Processing Device