Patent Assignment
Reel/Frame 059711/0264
Assignment of Assignor's Interest
Recorded: 2022-04-29
Pages: 7
Assignors
TAN, ZHONGKUI
Executed: 2019-11-06
XIE, LISI
Executed: 2019-10-30
ISHIKAWA, YASUSHI
Executed: 2019-11-01
PONATH, PATRICK
Executed: 2019-10-30
JUNG, SUNG JIN
Executed: 2019-10-30
YAMAGUCHI, YOKO
Executed: 2019-12-20
PARK, SANGJUN
Executed: 2019-11-09
LEE, WONCHUL
Executed: 2019-11-06
CHOI, JAYOUNG
Executed: 2019-10-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Directional Deposition in Etch Chamber