Patent Assignment
Reel/Frame 059810/0485
Assignment of Assignor's Interest
Recorded: 2022-05-04
Pages: 5
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
4-1, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Pattern Forming Process