Patent Assignment
Reel/Frame 059823/0919
Assignment of Assignor's Interest
Recorded: 2022-05-05
Pages: 3
Assignor
SHIBA, EIICHIRO
Executed: 2022-03-16
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method and System for Forming Patterned Structures Including Silicon Nitride