Patent Assignment
Reel/Frame 059827/0756
Assignment of Assignor's Interest
Recorded: 2022-05-05
Pages: 4
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method and System for Forming Silicon Nitride Layer Using Low Radio Frequency Plasma Process