Patent Assignment
Reel/Frame 059830/0795
Assignment of Assignor's Interest
Recorded: 2022-05-05
Pages: 7
Assignors
JUN, YONGMYUNG
Executed: 2022-04-18
KO, HYUNJIN
Executed: 2022-04-18
KIM, SEOHYUN
Executed: 2022-04-18
RYU, JAE SEONG
Executed: 2022-04-18
BAE, INKWANG
Executed: 2022-04-18
BAEK, SEUNGBU
Executed: 2022-04-18
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Chamber, Substrate Processing System Including the Same, and Substrate Processing Method Using the Same