Patent Assignment
Reel/Frame 059836/0274
Assignment of Assignor's Interest
Recorded: 2022-05-06
Pages: 9
Assignors
OYAMA, KENICHI
Executed: 2022-04-26
YAMAUCHI, SHOHEI
Executed: 2022-04-27
DOBASHI, KAZUYA
Executed: 2022-04-28
SHIMIZU, AKITAKA
Executed: 2022-04-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus, and Method for Producing Nanowire or Nanosheet Transistor