Patent Assignment
Reel/Frame 059855/0301
Assignment of Assignor's Interest
Recorded: 2022-05-04
Pages: 3
Assignor
KWON, HANSANG
Executed: 2022-04-26
Assignee
PUKYONG NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION
(YONGDANG-DONG, PUKYONG NATIONAL UNIVERSITY) 365, SINSEON-RO, NAM-GU, BUSAN, 48547, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Manufacturing Electrostatic Chuck Having Electrode Layer Made of Heterogeneous Composite Material, and Electrostatic Chuck Manufactured Thereby