Patent Assignment
Reel/Frame 059890/0087
Assignment of Assignor's Interest
Recorded: 2022-05-11
Pages: 4
Assignor
MIYAKUBO, YUSUKE
Executed: 2022-05-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Recording Medium, and Substrate Processing Apparatus