Patent Assignment
Reel/Frame 059946/0378
Assignment of Assignor's Interest
Recorded: 2022-05-18
Pages: 10
Assignors
NAM, YOONBUM
Executed: 2022-03-15
KIM, NAMKYUN
Executed: 2022-03-15
SHIM, SEUNGBO
Executed: 2022-03-15
NA, DONGHYEON
Executed: 2022-03-15
OKUNISHI, NAOHIKO
Executed: 2022-03-15
HAN, DONGSEOK
Executed: 2022-03-15
HUR, MINYOUNG
Executed: 2022-04-01
KIM, BYEONGSANG
Executed: 2022-05-06
YOON, KUIHYUN
Executed: 2022-03-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Measuring Parameters of Plasma, Apparatus for Measuring Parameters of Plasma, Plasma Processing System, and Method of Processing Wafer