Patent Assignment
Reel/Frame 059947/0557
Assignment of Assignor's Interest
Recorded: 2022-05-18
Pages: 3
Assignors
LIN, YUNG-CHEN
Executed: 2021-06-28
LANG, CHI-I
Executed: 2021-06-30
HWANG, HO-YUNG
Executed: 2021-06-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Atomic Layer Etching of Ru Metal