Patent Assignment
Reel/Frame 059960/0896
Assignment of Assignor's Interest
Recorded: 2022-05-19
Pages: 9
Assignors
HATANO, TATSUO
Executed: 2022-05-10
MIYASHITA, TETSUYA
Executed: 2022-05-09
WATANABE, NAOKI
Executed: 2022-05-10
SUZUKI, NAOYUKI
Executed: 2022-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Transfer Device and Substrate Processing System