Patent Assignment
Reel/Frame 059964/0923
Assignment of Assignor's Interest
Recorded: 2022-05-19
Pages: 3
Assignor
UMEOKA, YOSHIYUKI
Executed: 2022-04-28
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Substrate Treatment Apparatus with Virtual Dummy Wafer Function and Substrate Treatment Method
Application:
17/736,502 →
Publication:
US 2022/0359246