Patent Assignment
Reel/Frame 060006/0220
Assignment of Assignor's Interest
Recorded: 2022-05-24
Pages: 7
Assignors
VAKNIN, YONATAN
Executed: 2022-04-24
HILL, ANDREW V.
Executed: 2022-04-14
MANASSEN, AMNON
Executed: 2022-04-17
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Multi-Directional Overlay Metrology Using Multiple Illumination Parameters and Isolated Imaging