Patent Assignment
Reel/Frame 060011/0884
Assignment of Assignor's Interest
Recorded: 2022-05-25
Pages: 4
Assignors
KIM, YOONHAE
Executed: 2022-04-21
CHO, SUNGSIL
Executed: 2022-04-21
KIM, HWANSOO
Executed: 2022-04-07
PARK, KIEJIN
Executed: 2022-04-21
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Silicon Precursor Materials, Silicon-Containing Films, and Related Methods
Application:
63/238,542 →