Patent Application
Provisional
App. No. 63/238,542
· Confirmation No. 1565
Silicon Precursor Materials, Silicon-Containing Films, and Related Methods
Applicant:
Entegris, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-09-09 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2021-08-30 | PA.. |
Power of Attorney | 1 | View | |
| 2021-08-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-08-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2021-08-30 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2021-08-30 | ADS |
Application Data Sheet | 9 | View | |
| 2021-08-30 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2021-08-30 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-08-30 | SPEC |
Specification | 15 | View | |
| 2021-08-30 | CLM |
Claims | 3 | View | |
| 2021-08-30 | ABST |
Abstract | 1 | View |
Inventors
YoonHae KIM
Suwon-si, KOREA, REPUBLIC OF
Sungsil CHO
Anyang-si, KOREA, REPUBLIC OF
HwanSoo KIM
Hwaseong-si, KOREA, REPUBLIC OF
KieJin PARK
Suwon-si, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Prosecution
- Customer No.
- 144034
- Docket No.
- E000589
- Confirmation No.
- 1565
Child
Claims priority from a provisional application
→
App. 17/859,953
Filed 2022-07-07
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 18/674,531
Filed 2024-05-24
· Docketed New Case - Ready for Examination
Child
PCT
Claims priority from a provisional application
→
PCT/US2022/036404
Filed 2022-07-07
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2022-05-25
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Quick Facts
- App. No.
- 63/238,542
- Filed
- 2021-08-30
External Links