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App. No. 17/859,953 · Confirmation No. 5405

SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED METHODS

Applicant: ENTEGRIS, INC.
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2024-09-06 ABN Abandonment 2 View
2024-01-23 CTNF Non-Final Rejection 6 View
2024-01-23 892 List of references cited by examiner 1 View
2024-01-23 SRFW Search information including classification, databases and other search related notes 2 View
2024-01-23 1449 List of References cited by applicant and considered by examiner 4 View
2024-01-23 SRNT Examiner's search strategy and results 1 View
2024-01-23 SRNT Examiner's search strategy and results 53 View
2024-01-23 BIB Bibliographic Data Sheet 1 View
2023-09-25 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2023-09-25 FOR Foreign Reference 53 View
2023-09-25 FOR Foreign Reference 14 View
2023-09-25 FOR Foreign Reference 66 View
2023-09-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-09-22 ELC. Response to Election / Restriction Filed 1 View
2023-09-22 CLM Claims 3 View
2023-09-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2023-09-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-09-22 WFEE Fee Worksheet (SB06) 1 View
2023-07-24 CTRS Requirement for Restriction/Election 9 View
2023-07-24 FWCLM Index of Claims 1 View
2023-03-16 NTC.PUB Notice of Publication 1 View
2022-07-19 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2022-07-19 WFEE Fee Worksheet (SB06) 1 View
2022-07-19 APP.FILE.REC Filing Receipt 4 View
2022-07-07 PA.. Power of Attorney 1 View
2022-07-07 WFEE Fee Worksheet (SB06) 2 View
2022-07-07 N417 Electronic Filing System Acknowledgment Receipt 3 View
2022-07-07 TRNA Transmittal of New Application 2 View
2022-07-07 ADS Application Data Sheet 9 View
2022-07-07 SPEC Specification 17 View
2022-07-07 CLM Claims 3 View
2022-07-07 ABST Abstract 1 View
2022-07-07 DRW.NONBW Drawings-other than black and white line drawings 3 View
2022-07-07 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2022-07-07 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
17/859,953
Filed
2022-07-07
Pub. No.
US20230080718A1
Art Unit
1623