Patent Assignment
Reel/Frame 061286/0203
Assignment of Assignor's Interest
Recorded: 2022-08-19
Pages: 4
Assignors
KIM, YOONHAE
Executed: 2022-04-21
CHO, SUNGSIL
Executed: 2022-04-21
KIM, HWANSOO
Executed: 2022-04-07
PARK, KIEJIN
Executed: 2022-04-21
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Silicon Precursor Materials, Silicon-Containing Films, and Related Methods
Application:
17/859,953 →
Publication:
US 2023/0080718
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.