Patent Application
Utility
App. No. 18/674,531
· Confirmation No. 6020
SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED METHODS
Applicant:
ENTEGRIS, INC.
Docketed New Case - Ready for Examination
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Code | Description | Pages | ||
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| 2026-01-07 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2026-01-07 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2026-01-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-01-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-12-17 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2025-12-17 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2025-12-09 | OATH |
Oath or Declaration filed | 2 | View | |
| 2025-12-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-12-08 | A.NE |
Response After Final Action | — | View | |
| 2025-12-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-12-08 | CLM |
Claims | 2 | View | |
| 2025-12-08 | A.NE |
Response After Final Action | 1 | View | |
| 2025-12-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2025-12-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-12-08 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2025-10-08 | CTFR |
Final Rejection | 14 | View | |
| 2025-10-08 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2025-10-08 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2025-09-17 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | — | View | |
| 2025-09-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-09-17 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2025-09-17 | CLM |
Claims | 2 | View | |
| 2025-09-17 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2025-09-17 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-06-18 | CTNF |
Non-Final Rejection | 10 | View | |
| 2025-06-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2025-06-18 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2025-06-18 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2025-06-18 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2025-06-18 | SRNT |
Examiner's search strategy and results | 12 | View | |
| 2025-06-18 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2025-04-16 | ELC. |
Response to Election / Restriction Filed | — | View | |
| 2025-04-16 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2025-04-16 | CLM |
Claims | 2 | View | |
| 2025-04-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2025-04-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-03-14 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2024-09-19 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2024-06-14 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2024-06-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2024-06-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2024-06-14 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2024-05-24 | APP.TEXT |
Application body structured text document | — | View | |
| 2024-05-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-05-24 | A.PE |
Preliminary Amendment | 1 | View | |
| 2024-05-24 | SPEC |
Specification | 1 | View | |
| 2024-05-24 | CLM |
Claims | 2 | View | |
| 2024-05-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2024-05-24 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2024-05-24 | APP.TEXT |
Application body structured text document | — | View | |
| 2024-05-24 | ADS |
Application Data Sheet | 9 | View | |
| 2024-05-24 | FOR |
Foreign Reference | 67 | View | |
| 2024-05-24 | FOR |
Foreign Reference | 54 | View | |
| 2024-05-24 | PA.. |
Power of Attorney | 2 | View | |
| 2024-05-24 | SPEC |
Specification | 17 | View | |
| 2024-05-24 | CLM |
Claims | 3 | View | |
| 2024-05-24 | ABST |
Abstract | 1 | View | |
| 2024-05-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2024-05-24 | OATH |
Oath or Declaration filed | 2 | View | |
| 2024-05-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2024-05-24 | OATH |
Oath or Declaration filed | 2 | View | |
| 2024-05-24 | FOR |
Foreign Reference | 15 | View | |
| 2024-05-24 | OATH |
Oath or Declaration filed | 2 | View | |
| 2024-05-24 | DRW.NONBW |
Drawings-other than black and white line drawings | 3 | View | |
| 2024-05-24 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-05-24 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2024-05-24 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2024-05-24 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
YoonHae Kim
Suwon-si, KOREA, REPUBLIC OF
Sungsil Cho
Anyang-si, KOREA, REPUBLIC OF
HwanSoo Kim
Hwaseong-si, KOREA, REPUBLIC OF
KieJin Park
Gwacheon-si, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Classification
USPC
427/255.28
C01B33/027
C23C16/401
C01B33/08
C07C7/00
C07F7/025
C07F7/0838
C07F7/10
C07F7/18
C23C16/345
Prosecution
- Examiner
- BAKSHI, PANCHAM
- Art Unit
- 1623
- Customer No.
- 144034
- Docket No.
- E000589 US DIV
- Confirmation No.
- 6020
Publication
- Pub. No.
- US20240308856A1
- Pub. Date
- 2024-09-19
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2025-04-16
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Quick Facts
- App. No.
- 18/674,531
- Filed
- 2024-05-24
- Pub. No.
- US20240308856A1
- Examiner
- BAKSHI, PANCHAM
- Art Unit
- 1623
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