IP Library Patent Application 18674531
Patent Application Utility
App. No. 18/674,531 · Confirmation No. 6020

SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED METHODS

Applicant: ENTEGRIS, INC.
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2025-06-18 BIB Bibliographic Data Sheet 1 View
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Quick Facts
App. No.
18/674,531
Filed
2024-05-24
Pub. No.
US20240308856A1
Art Unit
1623