Patent Assignment
Reel/Frame 070862/0905
Assignment of Assignor's Interest
Recorded: 2025-04-16
Pages: 5
Assignors
KIM, YOONHAE
Executed: 2022-04-21
CHO, SUNGSIL
Executed: 2022-04-21
KIM, HWANSOO
Executed: 2022-04-07
PARK, KIEJIN
Executed: 2022-04-21
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Silicon Precursor Materials, Silicon-Containing Films, and Related Methods
Application:
18/674,531 →
Publication:
US 2024/0308856