Patent Assignment
Reel/Frame 060012/0491
Assignment of Assignor's Interest
Recorded: 2022-05-25
Pages: 3
Assignor
GOORDEN, SEBASTIANUS ADRIANUS
Executed: 2019-11-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Apparatus and Method for Measuring a Position of a Mark