Patent Assignment
Reel/Frame 060028/0616
Assignment of Assignor's Interest
Recorded: 2022-05-26
Pages: 8
Assignors
DE GROOT, ANTONIUS FRANCISCUS JOHANNES
Executed: 2020-09-03
STEUR, MICHAEL MARINUS ANNA
Executed: 2020-07-16
TEN KATE, NICOLAAS
Executed: 2020-09-02
TROMP, SIEGFRIED ALEXANDER
Executed: 2020-09-03
WINKELS, KOEN GERHARDUS
Executed: 2020-12-07
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Manufacturing a Substrate Support for a Lithographic Apparatus, Substrate Table, Lithographic Apparatus, Device Manufacturing Method, Method of Use
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.