Patent Assignment
Reel/Frame 060032/0078
Assignment of Assignor's Interest
Recorded: 2022-05-26
Pages: 3
Assignors
HSU, PEI-CHENG
Executed: 2022-05-02
LEE, HUAN-LING
Executed: 2022-05-02
LEE, HSIN-CHANG
Executed: 2022-05-23
LIN, CHIN-HSIANG
Executed: 2022-05-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Simultaneous Carbon Nanotube Growth, Catalyst Removal, Boron Nitride Nanotube Shell Formation Method for Euv Pellicles