Patent Assignment
Reel/Frame 060041/0620
Assignment of Assignor's Interest
Recorded: 2022-05-27
Pages: 8
Assignors
TAKAHASHI, NOBUHIRO
Executed: 2022-04-29
MATSUNAGA, JUNICHIRO
Executed: 2022-04-29
HORIKAWA, KIYOTAKA
Executed: 2022-04-29
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus