Patent Assignment
Reel/Frame 060060/0783
Assignment of Assignor's Interest
Recorded: 2022-05-31
Pages: 9
Assignors
YAMAGISHI, SYOUJI
Executed: 2022-05-30
EHARA, HIROKI
Executed: 2022-05-09
HAYASHI, HIROYUKI
Executed: 2022-05-09
NAKAGOMI, JUN
Executed: 2022-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Application:
17/804,379 →
Publication:
US 2022/0384146