Patent Assignment
Reel/Frame 060060/0874
Assignment of Assignor's Interest
Recorded: 2022-05-31
Pages: 9
Assignors
HILL, ANDREW V.
Executed: 2022-05-23
FELER, YOEL
Executed: 2022-05-24
MANASSEN, AMNON
Executed: 2022-05-30
GHINOVKER, MARK
Executed: 2022-05-25
VAKNIN, YONATAN
Executed: 2022-05-26
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Oblique Illumination for Overlay Metrology
Application:
17/684,179 →
Publication:
US 2022/0357674