Patent Assignment
Reel/Frame 060076/0834
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2022-06-01
Received: 2022-06-01
Pages: 5
Assignors
LE TIEC, CHRISTIANE
Executed: 2022-05-26
BECHER, CARSTEN
Executed: 2022-05-27
FITTKAU, JENS
Executed: 2022-05-27
NOLTE, DIRK
Executed: 2022-05-27
RETTIG, CURT
Executed: 2022-05-27
MITTLER, KAY
Executed: 2022-05-31
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ANDOVER, MA, 01810, UNITED STATES
Covered Application
(1)
Light-Enhanced Ozone Wafer Processing System and Method of Use
App. No. 17/830,232
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