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App. No. 17/830,232 · Confirmation No. 8105

Light-Enhanced Ozone Wafer Processing System and Method of Use

Applicant: MKS Inc.
Final Rejection Mailed View Publication ↗
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 Code Description Pages PDF
2026-08-12 CTFR Final Rejection 46 View
2026-08-12 892 List of references cited by examiner 2 View
2026-08-12 SRFW Search information including classification, databases and other search related notes 1 View
2026-08-12 SRNT Examiner's search strategy and results 77 View
2026-05-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-05-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2026-05-20 CLM Claims 6 View
2026-05-20 REM Applicant Arguments/Remarks Made in an Amendment 39 View
2026-05-20 WFEE Fee Worksheet (SB06) 1 View
2026-03-18 CTNF Non-Final Rejection 36 View
2026-03-18 892 List of references cited by examiner 2 View
2026-03-18 SRFW Search information including classification, databases and other search related notes 1 View
2026-03-18 SRNT Examiner's search strategy and results 38 View
2026-01-22 N572 Response - Re: Informal Power of Attorney (PTOL-308) 1 View
2026-01-16 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2026-01-16 ADS Application Data Sheet 10 View
2026-01-16 PA.. Power of Attorney 3 View
2026-01-16 R3.73 Assignee showing of ownership per 37 CFR 3.73 4 View
2026-01-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-01-16 M327 Miscellaneous Communication to Applicant - No Action Count 2 View
2026-01-14 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2026-01-14 RCEX Request for Continued Examination (RCE) 3 View
2026-01-14 ADS Application Data Sheet 10 View
2026-01-14 PA.. Power of Attorney 3 View
2026-01-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-01-14 N417.PYMT Electronic Fee Payment 2 View
2026-01-14 WFEE Fee Worksheet (SB06) 1 View
2025-12-23 CTAV Advisory Action (PTOL-303) 5 View
2025-12-23 1449 List of References cited by applicant and considered by examiner 5 View
2025-12-23 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2025-12-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-12-10 A.NE Response After Final Action 1 View
2025-12-10 CLM Claims 7 View
2025-12-10 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2025-12-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-12-10 N417.PYMT Electronic Fee Payment 2 View
2025-12-10 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2025-12-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-12-10 FOR Foreign Reference 24 View
2025-12-10 WFEE Fee Worksheet (SB06) 1 View
2025-10-22 CTFR Final Rejection 19 View
2025-10-22 892 List of references cited by examiner 2 View
2025-10-22 SRFW Search information including classification, databases and other search related notes 1 View
2025-10-22 SRNT Examiner's search strategy and results 32 View
2025-10-22 1449 List of References cited by applicant and considered by examiner 5 View
2025-09-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-09-08 N417.PYMT Electronic Fee Payment 2 View
2025-09-08 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2025-09-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2025-09-08 CLM Claims 7 View
2025-09-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2025-09-08 WFEE Fee Worksheet (SB06) 1 View
2025-06-18 CTNF Non-Final Rejection 19 View
2025-06-18 892 List of references cited by examiner 2 View
2025-06-18 SRFW Search information including classification, databases and other search related notes 1 View
2025-06-18 SRNT Examiner's search strategy and results 30 View
2025-06-18 FOR Foreign Reference 25 View
2025-06-18 FOR Foreign Reference 47 View
2025-06-18 FOR Foreign Reference 35 View
2025-06-18 1449 List of References cited by applicant and considered by examiner 4 View
2023-08-01 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2023-08-01 REF.OTHER Other reference-Patent/Application/Search Documents 3 View
2023-08-01 REF.OTHER Other reference-Patent/Application/Search Documents 4 View
2023-08-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-12-08 NTC.PUB Notice of Publication 1 View
2022-06-29 OATH Oath or Declaration filed 3 View
2022-06-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-06-13 WFEE Fee Worksheet (SB06) 1 View
2022-06-13 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2022-06-13 APP.FILE.REC Filing Receipt 4 View
2022-06-01 PA.. Power of Attorney 4 View
2022-06-01 ADS Application Data Sheet 10 View
2022-06-01 SPEC Specification 20 View
2022-06-01 CLM Claims 5 View
2022-06-01 ABST Abstract 1 View
2022-06-01 DRW Drawings-only black and white line drawings 17 View
2022-06-01 OATH Oath or Declaration filed 3 View
2022-06-01 WFEE Fee Worksheet (SB06) 2 View
2022-06-01 N417 Electronic Filing System Acknowledgment Receipt 3 View
2022-06-01 OATH Oath or Declaration filed 5 View
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Quick Facts
App. No.
17/830,232
Filed
2022-06-01
Pub. No.
US20220390840A1
Art Unit
1711