IP Library › Assignment 061572/0069
Patent Assignment
Reel/Frame 061572/0069

SECURITY INTEREST

Recorded: 2022-08-19 Received: 2022-08-19 Pages: 103
Assignors
MKS INSTRUMENTS, INC.
Executed: 2022-08-17
NEWPORT CORPORATION
Executed: 2022-08-17
Assignee
JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
10 SOUTH DEARBORN STREET, FLOOR L2N, CHICAGO, IL, 60603, UNITED STATES
Covered Applications (100)
Hybrid High-Power And Broadband Variable Impedance Modules
App. No. 17/873,624
→
Light-Enhanced Ozone Wafer Processing System and Method of Use
App. No. 17/830,232
→
Vibration Isolation Apparatus with Thermally Conductive Pneumatic Chamber, and Method of Manufacture
App. No. 17/721,834
→
Real-Time, Non-Invasive IEDF Plasma Sensor
App. No. 17/715,672
→
Method and Apparatus for Mass Flow Verification
App. No. 17/656,177
→
Method and Apparatus for Pressure Based Mass Flow Control
App. No. 17/651,751
→
REDUCED IMPEDANCE VARIATION IN A MODULAR 2-TERMINAL TERMINAL CONTACTING ELECTRICAL MEASUREMENT SYSTEM
App. No. 17/633,828
→
Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation Energy
App. No. 17/590,874
→
Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived Molecules and Method of Use
App. No. 17/583,712
→
Ion Source with Gas Delivery for High-Fidelity Analysis
App. No. 17/647,239
→
Demagnetizing Coils For Linearity Improvement Of Current Ratio Of Plasma Processing Systems
App. No. 17/566,274
→
Monitoring Radical Particle Concentration Using Mass Spectrometry
App. No. 17/644,704
→
Intermodulation Distortion Mitigation Using Electronic Variable Capacitor
App. No. 17/643,866
→
Method and Apparatus for Pulse Gas Delivery with Pressure Control
App. No. 17/455,626
→
Thermal Conductivity Pressure Gauge with Heated Chamber Wall
App. No. 17/453,450
→
PRESSURE CONTROL USING AN EXTERNAL TRIGGER
App. No. 17/452,953
→
Binary Gas Purity Analyzer
App. No. 17/452,030
→
PIEZOELECTRIC INERTIA ACTUATOR
App. No. 17/604,603
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Impedance Matching In A RF Power Generation System
App. No. 17/502,666
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LASER PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME
App. No. 17/599,756
→
Multi-Wavelength Ozone Concentration Sensor and Method of Use
App. No. 17/486,139
→
High Speed Synchronization Of Plasma Source/Bias Power Delivery
App. No. 17/480,993
→
METHOD AND APPARATUS FOR IMPEDANCE MATCHING IN A POWER DELIVERY SYSTEM FOR REMOTE PLASMA GENERATION
App. No. 17/406,378
→
Adaptive Pulse Shaping With Post Match Sensor
App. No. 17/396,901
→
METHOD AND APPARATUS FOR PLASMA GENERATION
App. No. 17/391,724
→
GaN Clamp with Uniform Pressure
App. No. 17/365,479
→
LASER PROCESSING APPARATUS, METHODS OF LASER-PROCESSING WORKPIECES AND RELATED ARRANGEMENTS
App. No. 17/354,680
→
Methods and Apparatus for Pressure Based Mass Flow Ratio Control
App. No. 17/342,341
→
PHASED ARRAY STEERING FOR LASER BEAM POSITIONING SYSTEMS
App. No. 17/326,664
→
Cooling And Compression Clamp For Short Lead Power Devices
App. No. 17/322,549
→
PHASED-ARRAY BEAM STEERING FOR MATERIALS PROCESSING
App. No. 17/290,198
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Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance
App. No. 17/237,913
→
Adaptive Control For A Power Generator
App. No. 17/232,950
→
LASER-PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME
App. No. 17/276,736
→
SYSTEMS AND METHODS FOR USE IN HANDLING COMPONENTS
App. No. 17/273,695
→
FRAME AND EXTERIOR SHROUDING FOR LASER PROCESSING SYSTEM
App. No. 17/272,611
→
SYSTEMS AND METHODS FOR DRILLING VIAS IN TRANSPARENT MATERIALS
App. No. 17/272,155
→
LASER-SEEDING FOR ELECTRO-CONDUCTIVE PLATING
App. No. 17/185,259
→
Load-Lock Gauge
App. No. 17/154,698
→
Polymer Composite Vacuum Components
App. No. 17/119,804
→
Switched Capacitor Modulator
App. No. 17/111,700
→
Method and Apparatus for Deposition Cleaning in a Pumping Line
App. No. 17/107,146
→
Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances
App. No. 17/102,598
→
METHOD AND APPARATUS FOR FOCUS CORRECTION OF MULTI-IMAGE LASER BEAM QUALITY MEASUREMENTS
App. No. 17/058,465
→
Thermal Conductivity Gauge
App. No. 16/953,923
→
Intermodulation Distortion Mitigation Using Electronic Variable Capacitor
App. No. 17/073,709
→
LOW WAVEFRONT DISTORTION OPTICAL MOUNT FOR THIN OPTICAL COMPONENTS
App. No. 17/070,039
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LASER-PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME
App. No. 17/047,254
→
Multi-Axis Motion System with Decoupled Wafer Chuck Support and Methods of Use and Manufacture
App. No. 17/017,402
→
Systems and Methods for Generating a Conductive Liquid Comprising Deionized Water with Ammonia Gas Dissolved Therein
App. No. 17/005,560
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MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE
App. No. 16/993,775
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Laser System Having A Multi-Stage Amplifier and Methods of Use
App. No. 16/992,400
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Endpoint Detection of Deposition Cleaning in a Pumping Line and a Processing Chamber
App. No. 16/990,396
→
Method And Apparatus To Enhance Sheath Formation, Evolution And Pulse To Pulse Stability In RF Powered Plasma Applications
App. No. 16/986,680
→
Laser Oscillator System Having Optical Element For Injection Seeding and Method of Manufacture
App. No. 16/957,812
→
Adaptive Periodic Waveform Controller
App. No. 16/905,377
→
Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger
App. No. 16/898,016
→
System and Method for Arc Detection Using a Bias RF Generator Signal
App. No. 16/887,346
→
SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES
App. No. 16/881,390
→
SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES
App. No. 16/881,458
→
MULTI-AXIS MACHINE TOOL AND METHODS OF CONTROLLING THE SAME
App. No. 16/854,207
→
Heated Throttle Valve Apparatus and Methods of Use and Manufacture
App. No. 16/851,644
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Valve Apparatuses and Related Methods for Reactive Process Gas Isolation and Facilitating Purge During Isolation
App. No. 16/849,871
→
Systems and Methods for Generating a Dissolved Ammonia Solution with Reduced Dissolved Carrier Gas and Oxygen Content
App. No. 16/842,515
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Capacitance Manometer With Improved Baffle for Improved Detection Accuracy
App. No. 16/825,994
→
Low Profile Heater Apparatus and Method of Manufacture
App. No. 16/823,715
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Methods and Apparatus for Pressure Based Mass Flow Ratio Control
App. No. 16/800,363
→
ACOUSTO-OPTIC SYSTEM HAVING PHASE-SHIFTING REFLECTOR
App. No. 16/636,605
→
Low Repetition Rate Infrared Tunable Femtosecond Laser Source
App. No. 16/778,567
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Method and Apparatus for Pulse Gas Delivery with Concentration Measurement
App. No. 16/742,172
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PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES
App. No. 16/724,844
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METHOD AND DEVICE FOR GENERATING A PULSED SIGNAL AT PARTICULAR POSITIONS OF A MOVING ELEMENT
App. No. 16/624,498
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Robust Ion Source
App. No. 16/713,713
→
Pulsed, Bidirectional Radio Frequency Source/Load
App. No. 16/710,412
→
NON-CONTACT HANDLER AND METHOD OF HANDLING WORKPIECES USING THE SAME
App. No. 16/621,630
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OPTICALLY CONTACTED ACOUSTO-OPTIC DEVICE AND METHOD OF MAKING THE SAME
App. No. 16/619,875
→
Gas Analyzer System with Ion Source
App. No. 16/698,178
→
APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM
App. No. 16/682,693
→
Method and Apparatus for Deposition Cleaning in a Pumping Line
App. No. 16/679,640
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Extremum Seeking Control Apparatus and Method for Automatic Frequency Tuning for RF Impedance Matching
App. No. 16/596,138
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MICROWAVE MAGNETRON WITH CONSTANT ANODIC IMPEDANCE AND SYSTEMS USING THE SAME
App. No. 16/593,942
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MULTI-AXIS MACHINE TOOL, METHODS OF CONTROLLING THE SAME AND RELATED ARRAGEMENTS
App. No. 16/499,511
→
Lens System for Use with High Laser Power Density Scanning System
App. No. 16/492,919
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LASER PROCESSING SYSTEMS AND METHODS FOR BEAM DITHERING AND SKIVING
App. No. 16/557,189
→
Multi-Junction Detector Device and Method of Manufacture
App. No. 16/553,921
→
Ozonated Water Delivery System and Method of Use
App. No. 16/553,033
→
HIGH RESPONSIVITY HIGH BANDWIDTH PHOTODIODE AND METHOD OF MANUFACTURE
App. No. 16/478,625
→
Feedback Control By RF Waveform Tailoring For Ion Energy Distribution
App. No. 16/509,088
→
PIECEWISE RF POWER SYSTEMS AND METHODS FOR SUPPLYING PRE-DISTORTED RF BIAS VOLTAGE SIGNALS TO AN ELECTRODE IN A PROCESSING CHAMBER
App. No. 16/506,555
→
ACOUSTO-OPTIC DEFLECTOR APPLICATIONS IN LASER PROCESSING OF DIELECTRIC OR OTHER MATERIALS
App. No. 16/505,422
→
High Speed Synchronization Of Plasma Source/Bias Power Delivery
App. No. 16/452,716
→
Radical Output Monitor for a Remote Plasma Source and Method of Use
App. No. 16/438,827
→
Modular Broadband Light Source with Lamp Insert and Methods of Use
App. No. 16/468,557
→
METHOD AND SYSTEM FOR EXTENDING OPTICS LIFETIME IN LASER PROCESSING APPARATUS
App. No. 16/464,551
→
Polymer Composite Vacuum Components
App. No. 16/415,313
→
ACTIVELY COOLED VACUUM ISOLATION VALVE
App. No. 16/408,752
→
Polygonal Toroidal Plasma Source
App. No. 16/406,339
→
LASER MICROMACHINING WITH TAILORED BURSTS OF SHORT LASER PULSES
App. No. 16/400,792
→
Gas Analysis with an Inverted Magnetron Source
App. No. 16/397,436
→
Method for Ion Mass Separation and Ion Energy Control in Process Plasmas
App. No. 16/377,522
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