IP Library › Granted Patent US 12,075,554
Granted Patent Utility
US 12,075,554 · Confirmation No. 9832

Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance

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2024-08-27 EGRANT.PDF Digitally signed official patent eGrant document — View
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2023-07-11 1449 List of References cited by applicant and considered by examiner 5 View
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2023-07-11 1449 List of References cited by applicant and considered by examiner 4 View
2023-07-11 1449 List of References cited by applicant and considered by examiner 4 View
2023-07-11 1449 List of References cited by applicant and considered by examiner 1 View
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2022-07-28 IDS.R197.REL ​Letter specifying the conditions for filing under 37 CFR 1.97​ 3 View
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Quick Facts
Patent No.
US 12,075,554
App. No.
17/237,913
Filed
2021-04-22
Granted
2024-08-27
Pub. No.
US20210243876A1
Art Unit
3761
PTA
-105 days