IP Library Granted Patent US 12,087,549
Granted Patent Utility
US 12,087,549 · Confirmation No. 1989

Demagnetizing Coils For Linearity Improvement Of Current Ratio Of Plasma Processing Systems

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Quick Facts
Patent No.
US 12,087,549
App. No.
17/566,274
Filed
2021-12-30
Granted
2024-09-10
Pub. No.
US20230215695A1
Examiner
LUQUE, RENAN
Art Unit
2896
PTA
-92 days