Patent Assignment
Reel/Frame 060084/0552
Assignment of Assignor's Interest
Recorded: 2022-06-02
Pages: 8
Assignors
KUNUGIMOTO, YUICHIRO
Executed: 2022-05-10
HAMADA, KEISHI
Executed: 2022-05-16
HAYAMA, TAKAFUMI
Executed: 2022-05-18
OKADA, MOTOI
Executed: 2022-05-24
HAMAGUCHI, SHOKI
Executed: 2022-05-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Monitoring Apparatus Based on Imaging Video Data, Substrate Processing Apparatus, Substrate Processing Monitoring Method, and Storage Medium