Patent Assignment
Reel/Frame 060085/0250
Assignment of Assignor's Interest
Recorded: 2022-06-02
Pages: 7
Assignor
ASAKO, RYUICHI
Executed: 2022-05-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Application:
17/756,780 →
Publication:
US 2023/0010867