Patent Assignment
Reel/Frame 060097/0015
Assignment of Assignor's Interest
Recorded: 2022-06-03
Pages: 12
Assignors
STIEPAN, HANS-MICHAEL
Executed: 2022-05-07
KORB, THOMAS
Executed: 2022-05-12
FOCA, EUGEN
Executed: 2022-05-14
KLOCHKOV, DMITRY
Executed: 2022-05-08
NEUMANN, JENS TIMO
Executed: 2022-05-17
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Parameterizing X-Ray Scattering Measurement Using Slice-and-Image Tomographic Imaging of Semiconductor Structures
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.