Patent Assignment
Reel/Frame 060107/0770
Assignment of Assignor's Interest
Recorded: 2022-06-06
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Tools and Systems