Patent Assignment
Reel/Frame 060124/0942
Assignment of Assignor's Interest
Recorded: 2022-06-07
Pages: 8
Assignors
FOCA, EUGEN
Executed: 2022-04-02
KLOCHKOV, DMITRY
Executed: 2022-04-04
KORB, THOMAS
Executed: 2022-04-02
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.